IP Library › Granted Patent US 6,473,221
Granted Patent Utility
US 6,473,221 · App. 09/803,014

Galvano-mirror and method of making the same

Inventors: Satoshi Ueda, Ippei Sawaki, Yoshihiro Mizuno
Patented Case View Patent ↗
Granted: Oct 29, 2002 Filed: Mar 12, 2001
Inventors
Satoshi Ueda
Ippei Sawaki
Yoshihiro Mizuno
Assignee (at issue)
Fujitsu Limited

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Quick Facts
Patent No.
US 6,473,221
App. No.
09/803,014
Filed
2001-03-12
Granted
2002-10-29
Kind
B2