Granted Patent
Utility
US 6,473,996 · App. 09/697,174
Load port system for substrate processing system, and method of processing substrate
Inventor:
Kenji Tokunaga
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Oct 27, 2000
Inventor
Kenji Tokunaga
Assignee (at issue)
Semiconductor Leading Edge Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.