Granted Patent
Utility
US 6,475,858 · App. 10/076,344
Method of manufacturing semiconductor device
Inventors:
Koichi Sugiyama, Yukio Hosoda, Shinichiroh Ikemasu
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Feb 19, 2002
Inventors
Koichi Sugiyama
Yukio Hosoda
Shinichiroh Ikemasu
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.