Granted Patent
Utility
US 6,476,987 · App. 09/629,256
Excimer laser with line narrowing
Inventors:
Juergen Kleinschmidt, Peter Heist, Matthias Kramer
Patented Case
View Patent ↗
Granted: Nov 5, 2002
Filed: Jul 31, 2000
Inventors
Juergen Kleinschmidt
Peter Heist
Matthias Kramer
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.