Granted Patent
Utility
US 6,486,940 · App. 09/620,886
High numerical aperture catadioptric lens
Inventor:
David M. Williamson
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Jul 21, 2000
Inventor
David M. Williamson
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.