Granted Patent
Utility
US 6,487,229 · App. 09/965,492
Beam delivery system for molecular fluorine (F2) laser
Inventors:
Sergei V. Govorkov, Klaus Vogler, Frank Voss, Rainer Patzel
Patented Case
View Patent ↗
Granted: Nov 26, 2002
Filed: Sep 26, 2001
Inventors
Sergei V. Govorkov
Klaus Vogler
Frank Voss
Rainer Patzel
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.