Granted Patent
Utility
US 6,490,147 · App. 09/878,483
High-Q micromechanical device and method of tuning same
Inventors:
Jun-Bo Yoon, Clark T.-C. Nguyen
Patented Case
View Patent ↗
Granted: Dec 3, 2002
Filed: Jun 11, 2001
Inventors
Jun-Bo Yoon
Clark T.-C. Nguyen
Assignee (at issue)
THE REGENTS OF THE UNIVERSITY OF MICHIGAN
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.