Granted Patent
Utility
US 6,490,307 · App. 09/447,882
Method and procedure to automatically stabilize excimer laser output parameters
Inventors:
Bruno Becker de Mos, Uwe Stamm, Klaus Vogler
Patented Case
View Patent ↗
Granted: Dec 3, 2002
Filed: Nov 23, 1999
Inventors
Bruno Becker de Mos
Uwe Stamm
Klaus Vogler
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.