Granted Patent
Utility
US 6,490,308 · App. 10/114,620
Laser gas replenishment method
Inventors:
Hans-Stephan Albrecht, Klaus Vogler, Thomas Schroeder
Patented Case
View Patent ↗
Granted: Dec 3, 2002
Filed: Apr 1, 2002
Inventors
Hans-Stephan Albrecht
Klaus Vogler
Thomas Schroeder
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.