IP Library Granted Patent US 6,492,026
Granted Patent Utility
US 6,492,026 · App. 09/553,191

Smoothing and barrier layers on high Tg substrates

Inventors: Gordon L. Graff, Mark E. Gross, Ming Kun Shi, Michael Hall, Peter M. Martin, Eric Mast
Patented Case View Patent ↗
Granted: Dec 10, 2002 Filed: Apr 20, 2000
Inventors
Gordon L. Graff
Mark E. Gross
Ming Kun Shi
Michael Hall
Peter M. Martin
Eric Mast
Assignee (at issue)
Battelle Memorial Institute

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Quick Facts
Patent No.
US 6,492,026
App. No.
09/553,191
Filed
2000-04-20
Granted
2002-12-10
Kind
B1