Granted Patent
Utility
US 6,492,068 · App. 09/478,789
Etching method for production of semiconductor devices
Inventor:
Koji Suzuki
Patented Case
View Patent ↗
Granted: Dec 10, 2002
Filed: Jan 7, 2000
Inventor
Koji Suzuki
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.