Granted Patent
Utility
US 6,492,827 · App. 09/692,659
Non-invasive electrical measurement of semiconductor wafers
Inventors:
Robert Mazur, Robert J. Hillard
Patented Case
View Patent ↗
Granted: Dec 10, 2002
Filed: Oct 19, 2000
Inventors
Robert Mazur
Robert J. Hillard
Assignee (at issue)
Solid State Measurements, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.