Granted Patent
Utility
US 6,495,840 · App. 09/748,241
Ion-implanting method and ion-implanting apparatus
Inventors:
Nariaki Hamamoto, Takao Matsumoto
Patented Case
View Patent ↗
Granted: Dec 17, 2002
Filed: Dec 27, 2000
Inventors
Nariaki Hamamoto
Takao Matsumoto
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.