Granted Patent
Utility
US 6,500,770 · App. 10/127,371
Method for forming a multi-layer protective coating over porous low-k material
Inventors:
Yu-Huei Cheng, Chen-Hua Yu
Patented Case
View Patent ↗
Granted: Dec 31, 2002
Filed: Apr 22, 2002
Inventors
Yu-Huei Cheng
Chen-Hua Yu
Assignee (at issue)
Taiwan Semiconductor Manufacturing Company, Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.