Granted Patent
Utility
US 6,511,539 · App. 09/392,371
Apparatus and method for growth of a thin film
Inventor:
Ivo Raaijmakers
Patented Case
View Patent ↗
Granted: Jan 28, 2003
Filed: Sep 8, 1999
Inventor
Ivo Raaijmakers
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.