Granted Patent
Utility
US 6,511,918 · App. 09/873,229
Method of structuring a metal-containing layer
Inventors:
Stephan Wege, Kerstin Krahl
Patented Case
View Patent ↗
Granted: Jan 28, 2003
Filed: Jun 4, 2001
Inventors
Stephan Wege
Kerstin Krahl
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.