Granted Patent
Utility
US 6,514,886 · App. 09/667,660
Method for elimination of contaminants prior to epitaxy
Inventor:
Gregory D. U'Ren
Patented Case
View Patent ↗
Granted: Feb 4, 2003
Filed: Sep 22, 2000
Inventor
Gregory D. U'Ren
Assignee (at issue)
Newport Fab, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.