Granted Patent
Utility
US 6,515,297 · App. 09/821,689
CVD-SiC self-supporting membrane structure and method for manufacturing the same
Inventors:
Shuichi Takeda, Hiroaki Sato
Patented Case
View Patent ↗
Granted: Feb 4, 2003
Filed: Mar 30, 2001
Inventors
Shuichi Takeda
Hiroaki Sato
Assignee (at issue)
Toshiba Ceramics Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.