Granted Patent
Utility
US 6,518,591 · App. 09/561,293
Contact monitor, method of forming same and method of analizing contact-, via- and/or trench-forming processes in an integrated circuit
Inventors:
Edward M. Shamble, Thomas Roy Boonstra, David J. Brownell, David Crow
Patented Case
View Patent ↗
Granted: Feb 11, 2003
Filed: Apr 28, 2000
Inventors
Edward M. Shamble
Thomas Roy Boonstra
David J. Brownell
David Crow
Assignee (at issue)
Cypress Semiconductor Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.