Granted Patent
Utility
US 6,518,646 · App. 09/819,615
Semiconductor device with variable composition low-k inter-layer dielectric and method of making
Inventors:
Dawn Hopper, Suzette K. Pangrle, Calvin T. Gabriel, Richard J. Huang, Lu You
Patented Case
View Patent ↗
Granted: Feb 11, 2003
Filed: Mar 29, 2001
Inventors
Dawn Hopper
Suzette K. Pangrle
Calvin T. Gabriel
Richard J. Huang
Lu You
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.