Granted Patent
Utility
US 6,519,760 · App. 09/840,305
Method and apparatus for minimizing optical proximity effects
Inventors:
Xuelong Shi, Jang Fung Chen, Stephen Hsu
Patented Case
View Patent ↗
Granted: Feb 11, 2003
Filed: Apr 24, 2001
Inventors
Xuelong Shi
Jang Fung Chen
Stephen Hsu
Assignee (at issue)
ASML Masktools B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.