Granted Patent
Utility
US 6,521,041 · App. 09/289,514
Etch stop layer system
Inventors:
Kenneth Chai-en Wu, Eugene A. Fitzgerald, Jeffrey T. Borenstein
Patented Case
View Patent ↗
Granted: Feb 18, 2003
Filed: Apr 9, 1999
Inventors
Kenneth Chai-en Wu
Eugene A. Fitzgerald
Jeffrey T. Borenstein
Assignee (at issue)
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.