Granted Patent
Utility
US 6,524,168 · App. 09/882,453
Composition and method for polishing semiconductors
Inventors:
Qiuliang Luo, James Shen
Patented Case
View Patent ↗
Granted: Feb 25, 2003
Filed: Jun 15, 2001
Inventors
Qiuliang Luo
James Shen
Assignee (at issue)
Rodel Holdings, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.