Granted Patent
Utility
US 6,527,866 · App. 09/501,042
Apparatus and method for deposition of thin films
Inventors:
Vladimir Matijasevic, Todd Kaplan
Patented Case
View Patent ↗
Granted: Mar 4, 2003
Filed: Feb 9, 2000
Inventors
Vladimir Matijasevic
Todd Kaplan
Assignee (at issue)
Conductus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.