Granted Patent
Utility
US 6,533,521 · App. 09/822,974
Integrated substrate handler having pre-aligner and storage pod access mechanism
Inventors:
Alexander Todorov, Mila Genov
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Mar 29, 2001
Inventors
Alexander Todorov
Mila Genov
Assignee (at issue)
GENMARK AUTOMATION, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.