Granted Patent
Utility
US 6,534,459 · App. 09/635,487
Resist residue remover
Inventors:
Takashi Yata, Shigeki Terayama, Yutaka Koinuma, Takeru Ohgushi
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Aug 9, 2000
Inventors
Takashi Yata
Shigeki Terayama
Yutaka Koinuma
Takeru Ohgushi
Assignee (at issue)
Kishimoto Sangyo Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.