Granted Patent
Utility
US 6,535,539 · App. 09/434,055
Excimer laser device
Inventors:
Kiyoharu Nakao, Hisashi Nara, Shunsuke Yoshioka
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Nov 4, 1999
Inventors
Kiyoharu Nakao
Hisashi Nara
Shunsuke Yoshioka
Assignees (at issue)
KOMATSU LTD.
EBARA CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.