Granted Patent
Utility
US 6,539,043 · App. 09/856,138
Discharge-pumped excimer laser device
Inventors:
Hiroyuki Shinozaki, Shinichi Sekiguchi, Toshimitsu Barada, Toshiharu Nakazawa
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: May 29, 2001
Inventors
Hiroyuki Shinozaki
Shinichi Sekiguchi
Toshimitsu Barada
Toshiharu Nakazawa
Assignees (at issue)
EBARA CORPORATION
KOMATSU LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.