Granted Patent
Utility
US 6,541,067 · App. 09/506,962
Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide and method of using same
Inventors:
Eugene P. Marsh, Stefan Uhlenbrock
Patented Case
View Patent ↗
Granted: Apr 1, 2003
Filed: Feb 18, 2000
Inventors
Eugene P. Marsh
Stefan Uhlenbrock
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.