Granted Patent
Utility
US 6,541,167 · App. 09/840,307
Optical proximity correction
Inventors:
John S. Petersen, Jang Fung Chen
Patented Case
View Patent ↗
Granted: Apr 1, 2003
Filed: Apr 24, 2001
Inventors
John S. Petersen
Jang Fung Chen
Assignee (at issue)
ASML Masktools Netherlands B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.