Granted Patent
Utility
US 6,541,394 · App. 09/481,992
Method of making a graded grown, high quality oxide layer for a semiconductor device
Inventors:
Yuanning Chen, Sailesh Mansinh Merchant, Pradip K. Roy
Patented Case
View Patent ↗
Granted: Apr 1, 2003
Filed: Jan 11, 2000
Inventors
Yuanning Chen
Sailesh Mansinh Merchant
Pradip K. Roy
Assignee (at issue)
Agere Systems Guardian Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.