Granted Patent
Utility
US 6,541,776 · App. 09/510,959
Device for electrostatic deflection of a particle beam
Inventors:
Hans-Joachim Döring, Thomas Elster
Patented Case
View Patent ↗
Granted: Apr 1, 2003
Filed: Feb 22, 2000
Inventors
Hans-Joachim Döring
Thomas Elster
Assignee (at issue)
Leica Microsystems Lithography
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.