Granted Patent
Utility
US 6,548,381 · App. 10/131,085
Ion beam irradiation apparatus and method of igniting a plasma for the same
Inventor:
Nariaki Hamamoto
Patented Case
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Granted: Apr 15, 2003
Filed: Apr 25, 2002
Inventor
Nariaki Hamamoto
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.