Granted Patent
Utility
US 6,553,042 · App. 09/727,510
Laser apparatus for generating vacuum ultraviolet narrow-band laser beams
Inventors:
Koji Shio, Toru Suzuki, Osamu Wakabayashi
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Dec 4, 2000
Inventors
Koji Shio
Toru Suzuki
Osamu Wakabayashi
Assignee (at issue)
KOMATSU LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.