Granted Patent
Utility
US 6,553,562 · App. 09/985,621
Method and apparatus for generating masks utilized in conjunction with dipole illumination techniques
Inventors:
Luigi Capodieci, Juan Andres Torres Robles, Lodewijk Hubertus Van Os
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Nov 5, 2001
Inventors
Luigi Capodieci
Juan Andres Torres Robles
Lodewijk Hubertus Van Os
Assignees (at issue)
ASML Masktools B.V.
ASM Lithography B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.