Granted Patent
Utility
US 6,555,483 · App. 09/993,833
Gate insulation film having a slanted nitrogen concentration profile
Inventor:
Eiji Hasegawa
Patented Case
View Patent ↗
Granted: Apr 29, 2003
Filed: Nov 6, 2001
Inventor
Eiji Hasegawa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.