Granted Patent
Utility
US 6,555,831 · App. 09/559,728
Ion implanting apparatus
Inventors:
Masashi Konishi, Shuichi Maeno, Yasunori Ando
Patented Case
View Patent ↗
Granted: Apr 29, 2003
Filed: Apr 28, 2000
Inventors
Masashi Konishi
Shuichi Maeno
Yasunori Ando
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.