Granted Patent
Utility
US 6,562,140 · App. 09/568,077
Apparatus for fabrication of thin films
Inventors:
Niklas Bondestam, Janne Kesala, Leif Keto, Pekka Soininen
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: May 10, 2000
Inventors
Niklas Bondestam
Janne Kesala
Leif Keto
Pekka Soininen
Assignee (at issue)
ASM Microchemistry Oy
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.