Granted Patent
Utility
US 6,565,661 · App. 09/325,835
High flow conductance and high thermal conductance showerhead system and method
Inventor:
Tue Nguyen
Patented Case
View Patent ↗
Granted: May 20, 2003
Filed: Jun 4, 1999
Inventor
Tue Nguyen
Assignee (at issue)
Simplus Systems Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.