Granted Patent
Utility
US 6,566,030 · App. 10/001,467
Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores
Inventors:
Robert D. Grober, Scott Bukofsky, Paul Dentinger, James Welch Taylor
Patented Case
View Patent ↗
Granted: May 20, 2003
Filed: Oct 31, 2001
Inventors
Robert D. Grober
Scott Bukofsky
Paul Dentinger
James Welch Taylor
Assignees (at issue)
Yale University
Wisconsin Alumni Research Foundation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.