IP Library › Granted Patent US 6,567,278
Granted Patent Utility
US 6,567,278 · App. 10/185,822

Electrical power supply suitable in particular for DC plasma processing

Inventors: Alfred Rufer, Claudio Zimmermann, Frederic Muller, Albert Bulliard
Patented Case View Patent ↗
Granted: May 20, 2003 Filed: Jun 27, 2002
Inventors
Alfred Rufer
Claudio Zimmermann
Frederic Muller
Albert Bulliard
Assignee (at issue)
CP Automation S.A.

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Quick Facts
Patent No.
US 6,567,278
App. No.
10/185,822
Filed
2002-06-27
Granted
2003-05-20
Kind
B2