Granted Patent
Utility
US 6,570,166 · App. 09/847,404
Operation method of ion source and ion beam irradiation apparatus
Inventor:
Takatoshi Yamashita
Patented Case
View Patent ↗
Granted: May 27, 2003
Filed: May 3, 2001
Inventor
Takatoshi Yamashita
Assignee (at issue)
NISSIN ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.