Granted Patent
Utility
US 6,570,901 · App. 09/791,430
Excimer or molecular fluorine laser having lengthened electrodes
Inventors:
Uwe Stamm, Juergen Kleinschmidt, Igor Bragin
Patented Case
View Patent ↗
Granted: May 27, 2003
Filed: Feb 22, 2001
Inventors
Uwe Stamm
Juergen Kleinschmidt
Igor Bragin
Assignee (at issue)
Lambda Physik AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.