Granted Patent
Utility
US 6,572,706 · App. 09/596,517
Integrated precursor delivery system
Inventors:
Tue Nguyen, Craig Bercaw
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Jun 19, 2000
Inventors
Tue Nguyen
Craig Bercaw
Assignee (at issue)
Simplus Systems Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.