IP Library Granted Patent US 6,572,707
Granted Patent Utility
US 6,572,707 · App. 09/594,887

Vaporizer for sensitive precursors

Inventor: Tue Nguyen
Patented Case View Patent ↗
Granted: Jun 3, 2003 Filed: Jun 14, 2000
Inventor
Tue Nguyen
Assignee (at issue)
Simplus Systems Corporation

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Quick Facts
Patent No.
US 6,572,707
App. No.
09/594,887
Filed
2000-06-14
Granted
2003-06-03
Kind
B1