Granted Patent
Utility
US 6,573,975 · App. 09/826,214
DUV scanner linewidth control by mask error factor compensation
Inventors:
Pradeep K. Govil, James Tsacoyeanes
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Apr 4, 2001
Inventors
Pradeep K. Govil
James Tsacoyeanes
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.