Granted Patent
Utility
US 6,573,999 · App. 09/615,964
Film thickness measurements using light absorption
Inventor:
Feng-Yi Yang
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Jul 14, 2000
Inventor
Feng-Yi Yang
Assignee (at issue)
Nanometrics Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.