Granted Patent
Utility
US 6,576,980 · App. 09/451,053
Surface treatment anneal of hydrogenated silicon-oxy-carbide dielectric layer
Inventors:
Huili Shao, Kurt G. Steiner, Susan Clay Vitkavage
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Nov 30, 1999
Inventors
Huili Shao
Kurt G. Steiner
Susan Clay Vitkavage
Assignee (at issue)
Agere Systems Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.