Granted Patent
Utility
US 6,577,443 · App. 09/878,697
Reduction objective for extreme ultraviolet lithography
Inventors:
Udo Dinger, Hans-Jurgen Mann
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Jun 11, 2001
Inventors
Udo Dinger
Hans-Jurgen Mann
Assignee (at issue)
Carl Zeiss Stiftung
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.