Granted Patent
Utility
US 6,577,664 · App. 09/466,063
Excimer laser device
Inventors:
Hisashi Nara, Toshihiro Nishisaka
Patented Case
View Patent ↗
Granted: Jun 10, 2003
Filed: Dec 17, 1999
Inventors
Hisashi Nara
Toshihiro Nishisaka
Assignees (at issue)
KOMATSU LTD.
EBARA CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.